Working Time: 9:30-18:00
2026 The 11th International Conference on Integrated Circuits and Microsystems
    Email: icicm_conf@vip.163.com
    Secretary: Ms. Mila Xiao(肖老师)

Track 17: MEMS for Radio Frequency and Positioning, Navigation, & Timing Application

Track 17: 微机电系统(MEMS)及其在射频与定位、导航及授时(PNT)的应用

Organizers / 组织者

Organizer / 组织者
Nan Wang 王楠
Professor / Deputy Dean, School of Microelectronics, Shanghai University
上海大学微电子学院,教授/副院长
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Abstract / 论坛简介

English: Driven by the rapid evolution of 5G/6G wireless communications and space-air-ground integrated networks, micro-electro-mechanical systems (MEMS) have emerged as the core technological pathway supporting next-generation wireless communications and positioning, navigation, & timing (PNT) systems, capitalizing on their distinct advantages of miniaturization, high integration and quality factors. This forum focuses on cutting-edge research topics, including super high frequency acoustic resonators and filters, electromagnetic and acoustic metasurfaces, as well as low-noise and high-precision PNTs. By gathering expert insights, this forum aims to explore the development trends of emerging MEMS devices, metamaterial architectures, and their interdisciplinary applications, thereby promoting full-chain innovation and industrial application, spanning from physical modeling, micro/nano-fabrication to system-level applications.

中文: 随着5G/6G通信与空天地一体化网络的加速演进,微机电系统(MEMS)凭借微型化、高集成度与高Q值优势,已成为支撑新一代无线通信与定位、导航及授时(PNT)系统的重要技术路线。本分论坛聚焦超高频声学谐振器/滤波器、电磁与声学超表面以及低噪声、高灵敏度、高精度PNT等热点研究方向展开交流。旨在汇聚专家智慧,探讨新兴MEMS器件、超材料架构及其交叉领域的演进方向,推动从物理建模、微纳制造到系统应用的全链条创新与产业化发展。

Topics / 讨论主题

面向5G/6G无线通信技术的射频MEMS器件,包括但不限于谐振器、滤波器、开关、移相网络等
RF MEMS devices for 5G/6G wireless communication, including but not limited to resonators, filters, switches, phase shifters, etc
电磁与声学超表面
Electromagnetic and acoustic metasurfaces
PNT传感及基准时钟器件
PNT sensors and reference clock devices
MEMS器件的功率容量与热稳定性优化
Optimization of power handling and thermal-frequency stability in MEMS devices
压电薄膜制备与异质集成工艺
Process technologies for piezoelectric thin-films fabrication and heterogeneous integration
先进MEMS工艺与封装技术
Advanced MEMS fabrication and packaging technologies
MEMS器件的多物理场建模与优化
Multi-physics modeling and optimization for MEMS devices